A Fabry-Perot Sensor with Cascaded Polymer Films Based on Vernier Effect for Simultaneous Measurement of Relative Humidity and Temperature

Sensors (Basel). 2023 Mar 3;23(5):2800. doi: 10.3390/s23052800.

Abstract

In this paper, fiber sensor based on Vernier effect for simultaneous measurement of relative humidity (RH) and temperature is proposed. The sensor is fabricated by coating two kinds of ultraviolet (UV) glue with different refractive indexes (RI) and thicknesses on the end face of a fiber patch cord. The thicknesses of two films are controlled to generate the Vernier effect. The inner film is formed by a cured lower-RI UV glue. The exterior film is formed by a cured higher-RI UV glue, of which thickness is much thinner than the inner film. Through the analysis of the Fast Fourier Transform (FFT) of the reflective spectrum, the Vernier effect is formed by the inner lower-RI polymer cavity and the cavity composed of both polymer films. By calibrating the RH and temperature response of two peaks on the envelope of the reflection spectrum, simultaneous measurements of RH and temperature are realized by solving a set of quadratic equations. Experimental results show that the highest RH and temperature sensitivities of the sensor are 387.3 pm/%RH (in 20%RH to 90%RH) and -533.0 pm/°C (in 15 °C to 40 °C), respectively. The sensor has merits of low cost, simple fabrication, and high sensitivity, which makes it very attractive for applications that need to simultaneously monitor these two parameters.

Keywords: Fabry–Perot interferometer; cascaded polymer films; optical Vernier effect; optical fiber sensor.