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A five degrees-of-freedom errors measurement system for rotary axis with reference laser for reference axis alignment.
Rev Sci Instrum. 2020 Jul 1;91(7):075101. doi: 10.1063/5.0013242.
Rev Sci Instrum. 2020.
PMID: 32752847
An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages.
Lou ZF, Hao XP, Cai YD, Lu TF, Wang XD, Fan KC.
Lou ZF, et al.
Sensors (Basel). 2019 Jun 27;19(13):2855. doi: 10.3390/s19132855.
Sensors (Basel). 2019.
PMID: 31252562
Free PMC article.
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Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages.
Cai Y, Sang Q, Lou ZF, Fan KC.
Cai Y, et al. Among authors: lou zf.
Sensors (Basel). 2019 Sep 5;19(18):3833. doi: 10.3390/s19183833.
Sensors (Basel). 2019.
PMID: 31491908
Free PMC article.
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