We demonstrated a multilayer molybdenum disulfide (MoS₂) nanomechanical resonator by using optical Fabry-Perot (F-P) interferometric excitation and detection. The thin circular MoS₂ nanomembrane with an approximate 8-nm thickness was transferred onto the endface of a ferrule with an inner diameter of 125 μm, which created a low finesse F-P interferometer with a cavity length of 39.92 μm. The effects of temperature and viscous air damping on resonance behavior of the resonator were investigated in the range of -10-80 °C. Along with the optomechanical behavior of the resonator in air, the measured resonance frequencies ranged from 36 kHz to 73 kHz with an extremely low inflection point at 20 °C, which conformed reasonably to those solved by previously obtained thermal expansion coefficients of MoS₂. Further, a maximum quality (Q) factor of 1.35 for the resonator was observed at 0 °C due to viscous dissipation, in relation to the lower Knudsen number of 0.0025~0.0034 in the tested temperature range. Moreover, measurements of Q factor revealed little dependence of Q on resonance frequency and temperature. These measurements shed light on the mechanisms behind viscous air damping in MoS₂, graphene, and other 2D resonators.
Keywords: Fabry-Perot interference; multilayer MoS2 diaphragm; resonator; viscous air damping.