Dynamic characteristics of a hydraulic amplification mechanism for large displacement actuators systems

Sensors (Basel). 2010;10(4):2946-56. doi: 10.3390/s100402946. Epub 2010 Mar 29.

Abstract

We have developed a hydraulic displacement amplification mechanism (HDAM) and studied its dynamic response when combined with a piezoelectric actuator. The HDAM consists of an incompressible fluid sealed in a microcavity by two largely deformable polydimethylsiloxane (PDMS) membranes. The geometry with input and output surfaces having different cross-sectional areas creates amplification. By combining the HDAM with micro-actuators, we can amplify the input displacement generated by the actuators, which is useful for applications requiring large deformation, such as tactile displays. We achieved a mechanism offering up to 18-fold displacement amplification for static actuation and 12-fold for 55 Hz dynamic actuation.

Keywords: MEMS; dynamic actuation; hydraulic amplification; liquid encapsulation; tactile display.

Publication types

  • Research Support, Non-U.S. Gov't