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Studies of Electrical Parameters and Thermal Stability of HiPIMS Hafnium Oxynitride (HfOxNy) Thin Films.
Materials (Basel). 2023 Mar 22;16(6):2539. doi: 10.3390/ma16062539.
Materials (Basel). 2023.
PMID: 36984417
Free PMC article.
Indigenous facility of the unipolar pulsed power generation for gas flow sputtering of titania films.
Alktash N, Muydinov R, Erfurt D, Hartig M, Gajewski W, Szyszka B.
Alktash N, et al. Among authors: gajewski w.
Rev Sci Instrum. 2023 Jul 1;94(7):075104. doi: 10.1063/5.0148807.
Rev Sci Instrum. 2023.
PMID: 37436119
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