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Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope.
Micromachines (Basel). 2020 Sep 17;11(9):862. doi: 10.3390/mi11090862.
Micromachines (Basel). 2020.
PMID: 32957573
Free PMC article.
A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators.
Saleem MM, Saghir S, Bukhari SAR, Hamza A, Shakoor RI, Bazaz SA.
Saleem MM, et al. Among authors: bukhari sar.
Micromachines (Basel). 2021 Mar 16;12(3):310. doi: 10.3390/mi12030310.
Micromachines (Basel). 2021.
PMID: 33809735
Free PMC article.
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