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A Review of MEMS Capacitive Microphones.
Micromachines (Basel). 2020 May 8;11(5):484. doi: 10.3390/mi11050484.
Micromachines (Basel). 2020.
PMID: 32397340
Free PMC article.
Review.
The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing.
Zawawi SA, Hamzah AA, Majlis BY, Mohd-Yasin F.
Zawawi SA, et al.
Micromachines (Basel). 2021 Sep 13;12(9):1101. doi: 10.3390/mi12091101.
Micromachines (Basel). 2021.
PMID: 34577744
Free PMC article.
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