Multiwall carbon nanotubes (MWCNTs) were easily and efficiently decorated with Pd nanoparticles through a vapor-phase impregnation-decomposition method starting from palladium acetylacetonates. The sensor device consisted on a film of sensitive material (MWCNTs-Pd) deposited by drop coating on platinum interdigitated electrodes on a SiO₂ substrate. The sensor exhibited a resistance change to ozone (O₃) with a response time of 60 s at different temperatures and the capability of detecting concentrations up to 20 ppb. The sensor shows the best response when exposed to O3 at 120 °C. The device shows a very reproducible sensor performance, with high repeatability, full recovery and efficient response.