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PEALD-Grown Crystalline AlN Films on Si (100) with Sharp Interface and Good Uniformity.
Nanoscale Res Lett. 2017 Dec;12(1):279. doi: 10.1186/s11671-017-2049-1. Epub 2017 Apr 18.
Nanoscale Res Lett. 2017.
PMID: 28423865
Free PMC article.
A large-scale, ultrahigh-resolution nanoemitter ordered array with PL brightness enhanced by PEALD-grown AlN coating.
Peng M , Zheng X , Liu S , Wei H , He Y , Li M , An Y , Song Y , Qiu P .
Peng M , et al. Among authors: liu s.
Nanoscale. 2019 Feb 21;11(8):3710-3717. doi: 10.1039/c8nr07946c.
Nanoscale. 2019.
PMID: 30742183
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Interfacial Tailoring for the Suppression of Impurities in GaN by In Situ Plasma Pretreatment via Atomic Layer Deposition.
Liu S, Zhao G, He Y, Wei H, Li Y, Qiu P, Song Y, An Y, Wang X, Wang X, Cheng J, Peng M, Zheng X.
Liu S, et al.
ACS Appl Mater Interfaces. 2019 Sep 25;11(38):35382-35388. doi: 10.1021/acsami.9b08816. Epub 2019 Sep 16.
ACS Appl Mater Interfaces. 2019.
PMID: 31483596
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