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Toward Single-Atomic-Layer Lithography on Highly Oriented Pyrolytic Graphite Surfaces Using AFM-Based Electrochemical Etching.
Nanomanuf Metrol. 2022;5(1):32-38. doi: 10.1007/s41871-022-00127-9. Epub 2022 Mar 11.
Nanomanuf Metrol. 2022.
PMID: 35402782
Free PMC article.
Structure Fabrication on Silicon at Atomic and Close-To-Atomic Scale Using Atomic Force Microscopy: Implications for Nanopatterning and Nanodevice Fabrication.
Mathew PT, Han W, Rodriguez BJ, Fang F.
Mathew PT, et al.
Micromachines (Basel). 2022 Mar 26;13(4):524. doi: 10.3390/mi13040524.
Micromachines (Basel). 2022.
PMID: 35457829
Free PMC article.
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