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Dielectric properties of porous silicon for use as a substrate for the on-chip integration of millimeter-wave devices in the frequency range 140 to 210 GHz.
Nanoscale Res Lett. 2014 Aug 21;9(1):418. doi: 10.1186/1556-276X-9-418. eCollection 2014.
Nanoscale Res Lett. 2014.
PMID: 25206316
Free PMC article.
Novel air flow meter for an automobile engine using a Si sensor with porous Si thermal isolation.
Hourdakis E, Sarafis P, Nassiopoulou AG.
Hourdakis E, et al. Among authors: sarafis p.
Sensors (Basel). 2012 Nov 2;12(11):14838-50. doi: 10.3390/s121114838.
Sensors (Basel). 2012.
PMID: 23202189
Free PMC article.
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