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ITO film stack engineering for low-loss silicon optical modulators.
Sci Rep. 2022 Apr 15;12(1):6321. doi: 10.1038/s41598-022-09973-5.
Sci Rep. 2022.
PMID: 35428848
Free PMC article.
Self-Controlled Cleaving Method for Silicon DRIE Process Cross-Section Characterization.
Baklykov DA, Andronic M, Sorokina OS, Avdeev SS, Buzaverov KA, Ryzhikov IA, Rodionov IA.
Baklykov DA, et al. Among authors: sorokina os.
Micromachines (Basel). 2021 May 8;12(5):534. doi: 10.3390/mi12050534.
Micromachines (Basel). 2021.
PMID: 34066851
Free PMC article.
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