Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Olayinka Oluwatosin Abegunde; Esther Titilayo Akinlabi; Philip Oluseyi Oladijo

doi:10.1016/j.dib.2020.105205

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Data Brief. 2020 Jan 25:29:105205. doi: 10.1016/j.dib.2020.105205. eCollection 2020 Apr.

Authors

Olayinka Oluwatosin Abegunde¹, Esther Titilayo Akinlabi¹, Philip Oluseyi Oladijo^{1

2}

Affiliations

¹ Department of Mechanical Engineering Science, University of Johannesburg, Johannesburg, South Africa.
² Department of Chemical, Materials and Metallurgy Engineering, Botswana Institute of Science and Technology, Palapye, Botswana.

Abstract

The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

Keywords: Atomic force microscope (AFM); Field emission scanning electron microscope (FESEM); Grazing incidence X-ray diffractometer (GIXRD); Nanohardness; RF magnetron sputtering; Raman spectroscopy; TiC thin film.