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Thermal Analysis of Parylene Thin Films for Barrier Layer Applications.
Polymers (Basel). 2022 Sep 4;14(17):3677. doi: 10.3390/polym14173677.
Polymers (Basel). 2022.
PMID: 36080750
Free PMC article.
High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area.
Barth S, Schreiber T, Cornelius S, Zywitzki O, Modes T, Bartzsch H.
Barth S, et al. Among authors: zywitzki o.
Micromachines (Basel). 2022 Sep 21;13(10):1561. doi: 10.3390/mi13101561.
Micromachines (Basel). 2022.
PMID: 36295914
Free PMC article.
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