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Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control.
Nat Commun. 2022 Dec 9;13(1):7597. doi: 10.1038/s41467-022-35428-6.
Nat Commun. 2022.
PMID: 36494441
Free PMC article.
Publisher Correction: Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control.
Nguyen CT, Cho EH, Gu B, Lee S, Kim HS, Park J, Yu NK, Shin S, Shong B, Lee JY, Lee HB.
Nguyen CT, et al. Among authors: yu nk.
Nat Commun. 2023 Jan 12;14(1):184. doi: 10.1038/s41467-023-35883-9.
Nat Commun. 2023.
PMID: 36635326
Free PMC article.
No abstract available.
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