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bai yuan sheng
(2 results)?
A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial image.
Opt Express. 2018 Dec 10;26(25):32743-32756. doi: 10.1364/OE.26.032743.
Opt Express. 2018.
PMID: 30645437
Free article.
Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithm.
Sun Y, Sheng N, Li T, Li Y, Li E, Wei P.
Sun Y, et al. Among authors: sheng n.
Opt Express. 2019 Feb 4;27(3):2754-2770. doi: 10.1364/OE.27.002754.
Opt Express. 2019.
PMID: 30732308
Free article.
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Multi-objective lithographic source mask optimization to reduce the uneven impact of polarization aberration at full exposure field.
Li T, Sun Y, Li E, Sheng N, Li Y, Wei P, Liu Y.
Li T, et al. Among authors: sheng n.
Opt Express. 2019 May 27;27(11):15604-15616. doi: 10.1364/OE.27.015604.
Opt Express. 2019.
PMID: 31163755
Free article.
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Co-optimization method to reduce the pattern distortion caused by polarization aberration in anamorphic EUV lithography.
Sheng N, Sun Y, Li E, Li T, Li Y, Wei P, Liu L.
Sheng N, et al.
Appl Opt. 2019 May 10;58(14):3718-3728. doi: 10.1364/AO.58.003718.
Appl Opt. 2019.
PMID: 31158182
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