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Proton-exchanged wet etching of recessed-structure SAW filter.
Tsai SH, Wang NF, Houng MP, Wang YH. Tsai SH, et al. Among authors: wang nf. IEEE Trans Ultrason Ferroelectr Freq Control. 2003 Sep;50(9):1219-22. doi: 10.1109/tuffc.2003.1235335. IEEE Trans Ultrason Ferroelectr Freq Control. 2003. PMID: 14561040
Direct bonding of recessed-structure SAW filter on silicon substrate.
Tsai SH, Wang NF, Horng JH, Houng MP, Wang YH. Tsai SH, et al. Among authors: wang nf. IEEE Trans Ultrason Ferroelectr Freq Control. 2004 Jul;51(7):913-6. doi: 10.1109/tuffc.2004.1320752. IEEE Trans Ultrason Ferroelectr Freq Control. 2004. PMID: 15301012