Simulation of Laser-Heating and Energetic Plasma Plume Expansion in Pulsed Laser Deposition of Y3Fe5O12

Joko Suwardy; Muzakkiy Putra Muhammad Akhir; Robi Kurniawan; Beni Rio Hermanto; Isa Anshori; Mohammad Hamzah Fauzi

doi:10.3390/mi13112012

Simulation of Laser-Heating and Energetic Plasma Plume Expansion in Pulsed Laser Deposition of Y₃Fe₅O₁₂

Micromachines (Basel). 2022 Nov 18;13(11):2012. doi: 10.3390/mi13112012.

Authors

Joko Suwardy¹, Muzakkiy Putra Muhammad Akhir¹, Robi Kurniawan², Beni Rio Hermanto³, Isa Anshori³, Mohammad Hamzah Fauzi^{1

4}

Affiliations

¹ Research Center for Quantum Physics, National Research and Innovation Agency (BRIN), South Tangerang 15314, Indonesia.
² Department of Physics, Faculty of Mathematics and Natural Sciences, Universitas Negeri Malang, Jl. Semarang No. 5, Malang 65145, Indonesia.
³ Biomedical Engineering Department, School of Electrical Engineering and Informatics, Bandung Institute of Technology, Bandung 40132, Indonesia.
⁴ Research Collaboration Center for Quantum Technology 2.0, Bandung 40132, Indonesia.

Abstract

In the present study, numerically iterative models are employed to study two processes involved in the pulsed laser deposition of an Y₃Fe₅O₁₂ target. The 1D conduction heat model is used to evaluate the temperature of the target irradiated by a nano-second pulse laser, taking into account the plasma shielding effect. Further, the gas dynamics model is employed to simulate the kinetic of plasma plume expansion. The results may be important in obtaining high-quality Y₃Fe₅O₁₂ thin films.

Keywords: Y3Fe5O12; plasma dynamics; pulsed laser deposition.

Grants and funding

This research was partly funded by “Rumah Program Sains Fundamental Molekuler 2022”, proposal code No. 132, Research Organization for Nanotechnology and Materials, National Research and Innovation Agency (BRIN), Indonesia. The authors thank the School of Electrical Engineering and Informatics, Bandung Institute of Technology, for funding the article processing charge.