Flow force augmented 3D suspended polymeric microfluidic (SPMF³ ) platform

Detection and study of bioelements using microfluidic systems has been of great interest in the biodiagnostics field. Microcantilevers are the most used systems in biodetection due to their implementation simplicity which have been used for a wide variety of applications ranging from cellular to molecular diagnosis. However, increasing further the sensitivity of the microcantilever systems have a great effect on the cantilever based sensing for chemical and bio applications. In order to improve further the performance of microcantilevers, a flow force augmented 3D suspended microchannel is proposed using which microparticles can be conveyed through a microchannel inside the microcantilever to the detection area. This innovative microchannel design addresses the low sensitivity issue by increasing its sensitivity up to 5 times than the earlier reported similar microsystems. Moreover, fabricating this microsystem out of Polydimethylsiloxane (PDMS) would eliminate external exciter dependency in many detection applications such as biodiagnostics. In this study, the designed microsystem has been analyzed theoretically, simulated and tested. Moreover, the microsystem has been fabricated and tested under different conditions, the results of which have been compared with simulation results. Finally, its innovative fabrication process and issues are reported and discussed.