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Year Number of Results
2009 1
2010 1
2014 5
2015 6
2016 6
2017 5
2018 3
2020 2
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2022 3
2023 2
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33 results

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Page 1
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics.
Di Palma V, Pianalto A, Perego M, Tallarida G, Codegoni D, Fanciulli M. Di Palma V, et al. Among authors: perego m. Nanomaterials (Basel). 2023 Mar 8;13(6):976. doi: 10.3390/nano13060976. Nanomaterials (Basel). 2023. PMID: 36985871 Free PMC article.
Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film.
Kuschlan S, Chiarcos R, Laus M, Pérez-Murano F, Llobet J, Fernandez-Regulez M, Bonafos C, Perego M, Seguini G, De Michielis M, Tallarida G. Kuschlan S, et al. Among authors: perego m. ACS Appl Mater Interfaces. 2023 Dec 20;15(50):57928-57940. doi: 10.1021/acsami.3c03782. Epub 2023 Jun 14. ACS Appl Mater Interfaces. 2023. PMID: 37314734 Free PMC article. Review.
Phosphorus doping of ultra-small silicon nanocrystals.
Perego M, Bonafos C, Fanciulli M. Perego M, et al. Nanotechnology. 2010 Jan 15;21(2):025602. doi: 10.1088/0957-4484/21/2/025602. Epub 2009 Dec 3. Nanotechnology. 2010. PMID: 19955620
Al2O3 Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication.
Seguini G, Motta A, Bigatti M, Caligiore FE, Rademaker G, Gharbi A, Tiron R, Tallarida G, Perego M, Cianci E. Seguini G, et al. Among authors: perego m. ACS Appl Nano Mater. 2022 Jul 22;5(7):9818-9828. doi: 10.1021/acsanm.2c02013. Epub 2022 Jul 5. ACS Appl Nano Mater. 2022. PMID: 35937588 Free PMC article.
Engineering of the spin on dopant process on silicon on insulator substrate.
Barri C, Mafakheri E, Fagiani L, Tavani G, Barzaghi A, Chrastina D, Fedorov A, Frigerio J, Lodari M, Scotognella F, Arduca E, Abbarchi M, Perego M, Bollani M. Barri C, et al. Among authors: perego m. Nanotechnology. 2021 Jan 8;32(2):025303. doi: 10.1088/1361-6528/abbdda. Nanotechnology. 2021. PMID: 33007762
GISAXS Analysis of the In-Depth Morphology of Thick PS-b-PMMA Films.
Ferrarese Lupi F, Giammaria TJ, Seguini G, Laus M, Dubček P, Pivac B, Bernstorff S, Perego M. Ferrarese Lupi F, et al. Among authors: perego m. ACS Appl Mater Interfaces. 2017 Mar 29;9(12):11054-11063. doi: 10.1021/acsami.7b01366. Epub 2017 Mar 14. ACS Appl Mater Interfaces. 2017. PMID: 28263052
Focus on sub-10 nm nanofabrication.
Perego M. Perego M. Nanotechnology. 2018 Jun 29;29(26):260201. doi: 10.1088/1361-6528/aabe23. Epub 2018 Apr 30. Nanotechnology. 2018. PMID: 29708101 No abstract available.
33 results