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Page 1
Functional Devices from Bottom-Up Silicon Nanowires: A Review.
Nanomaterials (Basel). 2022 Mar 22;12(7):1043. doi: 10.3390/nano12071043.
Nanomaterials (Basel). 2022.
PMID: 35407161
Free PMC article.
Review.
Improvement of AlN Film Quality Using Plasma Enhanced Atomic Layer Deposition with Substrate Biasing.
Legallais M, Mehdi H, David S, Bassani F, Labau S, Pelissier B, Baron T, Martinez E, Ghibaudo G, Salem B.
Legallais M, et al.
ACS Appl Mater Interfaces. 2020 Sep 2;12(35):39870-39880. doi: 10.1021/acsami.0c10515. Epub 2020 Aug 21.
ACS Appl Mater Interfaces. 2020.
PMID: 32805854
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Wafer-scale HfO2 encapsulated silicon nanowire field effect transistor for efficient label-free DNA hybridization detection in dry environment.
Jayakumar G, Legallais M, Hellström PE, Mouis M, Pignot-Paintrand I, Stambouli V, Ternon C, Östling M.
Jayakumar G, et al. Among authors: legallais m.
Nanotechnology. 2019 May 3;30(18):184002. doi: 10.1088/1361-6528/aaffa5. Epub 2019 Jan 17.
Nanotechnology. 2019.
PMID: 30654356
No abstract available.
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