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Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps.
Nanomaterials (Basel). 2021 Apr 9;11(4):956. doi: 10.3390/nano11040956.
Nanomaterials (Basel). 2021.
PMID: 33918594
Free PMC article.
Optimized plasma-assisted bi-layer photoresist fabrication protocol for high resolution microfabrication of thin-film metal electrodes on porous polymer membranes.
Schuller P, Rothbauer M, Eilenberger C, Kratz SRA, Höll G, Taus P, Schinnerl M, Genser J, Ertl P, Wanzenboeck H.
Schuller P, et al. Among authors: schinnerl m.
MethodsX. 2019 Nov 9;6:2606-2613. doi: 10.1016/j.mex.2019.10.038. eCollection 2019.
MethodsX. 2019.
PMID: 31763193
Free PMC article.
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