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Table representation of search results timeline featuring number of search results per year.

Year Number of Results
2002 1
2003 1
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2005 3
2006 1
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2008 5
2009 4
2010 6
2011 5
2012 3
2013 7
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2015 6
2016 3
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2024 1

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Page 1
Inherent area-selective atomic layer deposition of ZnS.
Zhang C, Vehkamäki M, Leskelä M, Ritala M. Zhang C, et al. Among authors: leskela m. Dalton Trans. 2023 Jul 18;52(28):9622-9630. doi: 10.1039/d3dt01435e. Dalton Trans. 2023. PMID: 37377382
Atomic Layer Deposition of Photoconductive Cu2O Thin Films.
Iivonen T, Heikkilä MJ, Popov G, Nieminen HE, Kaipio M, Kemell M, Mattinen M, Meinander K, Mizohata K, Räisänen J, Ritala M, Leskelä M. Iivonen T, et al. Among authors: leskela m. ACS Omega. 2019 Jun 27;4(6):11205-11214. doi: 10.1021/acsomega.9b01351. eCollection 2019 Jun 30. ACS Omega. 2019. PMID: 31460221 Free PMC article.
Atomic Layer Deposition of Rhenium Disulfide.
Hämäläinen J, Mattinen M, Mizohata K, Meinander K, Vehkamäki M, Räisänen J, Ritala M, Leskelä M. Hämäläinen J, et al. Among authors: leskela m. Adv Mater. 2018 Jun;30(24):e1703622. doi: 10.1002/adma.201703622. Epub 2018 Jan 5. Adv Mater. 2018. PMID: 29315833
Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Films.
Mattinen M, King PJ, Khriachtchev L, Meinander K, Gibbon JT, Dhanak VR, Räisänen J, Ritala M, Leskelä M. Mattinen M, et al. Among authors: leskela m. Small. 2018 May;14(21):e1800547. doi: 10.1002/smll.201800547. Epub 2018 Apr 19. Small. 2018. PMID: 29673074
Atomic layer deposition of CoF2, NiF2 and HoF3 thin films.
Atosuo E, Mäntymäki M, Pesonen L, Mizohata K, Hatanpää T, Leskelä M, Ritala M. Atosuo E, et al. Among authors: leskela m. Dalton Trans. 2023 Aug 8;52(31):10844-10854. doi: 10.1039/d3dt01717f. Dalton Trans. 2023. PMID: 37486012
Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films.
Atosuo E, Heikkilä MJ, Majlund J, Pesonen L, Mäntymäki M, Mizohata K, Leskelä M, Ritala M. Atosuo E, et al. Among authors: leskela m. ACS Omega. 2024 Feb 26;9(10):11747-11754. doi: 10.1021/acsomega.3c09147. eCollection 2024 Mar 12. ACS Omega. 2024. PMID: 38496930 Free PMC article.
70 results