Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Sensors (Basel). 2018 Jul 16;18(7):2301. doi: 10.3390/s18072301.

Abstract

We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.

Keywords: interdigital transducer (IDT); microaccelerometer; quartz packaging; surface acoustic waves (SAWs).