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Carrier Trap Density Reduction at SiO2/4H-Silicon Carbide Interface with Annealing Processes in Phosphoryl Chloride and Nitride Oxide Atmospheres.
Materials (Basel). 2023 Jun 14;16(12):4381. doi: 10.3390/ma16124381.
Materials (Basel). 2023.
PMID: 37374564
Free PMC article.
Microscopic investigations of morphology and thermal properties of ZnO thin films grown by atomic layer deposition method.
Kaźmierczak-Bałata A, Bodzenta J, Guziewicz M.
Kaźmierczak-Bałata A, et al. Among authors: guziewicz m.
Ultramicroscopy. 2020 Mar;210:112923. doi: 10.1016/j.ultramic.2019.112923. Epub 2019 Dec 25.
Ultramicroscopy. 2020.
PMID: 31911392
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