Calibration of flow devices is important in several areas of pharmaceutical, flow chemistry and health care applications where volumetric dosage or delivery at given flow rates are crucial for the process. Although most of the flow devices are measuring flow rates of process-oriented liquids, their calibrations are often performed with water as calibration liquid. It is recommended to perform the calibrations of the flow devices with process-oriented liquids as the liquid itself might influence the performance of the flow devices. Therefore, METAS has developed facilities with METAS flow generators to address the issue of measuring with process-oriented liquids for flow rates from 400 ml/min down to 50 nl/min with uncertainties from 0.07-0.9 %. Traceability is guaranteed through the calibration of the generated flow rates of the METAS flow generators by means of the dynamic gravimetric method where a liquid of well-known density and a well-controlled evaporation rate is used. The design of the milli-flow facility will be discussed as well as first measurement results of the METAS flow generators in the range of micro-flow and milli-flow using water and other liquids.