Ultrathin fullerene films as high-resolution molecular resists for low-voltage electron-beam lithography
Small
.
2006 Aug;2(8-9):1003-6.
doi: 10.1002/smll.200500443.
Authors
Francis P Gibbons
1
,
Alex P G Robinson
,
Richard E Palmer
,
Mayanditheuar Manickam
,
Jon A Preece
Affiliation
1
Nanoscale Physics Research Laboratory, School of Physics and Astronomy, The University of Birmingham, Edgbaston, Birmingham B15 2TT, UK. francis@nprl.ph.bham.ac.uk
PMID:
17193158
DOI:
10.1002/smll.200500443
No abstract available
Publication types
Research Support, Non-U.S. Gov't
MeSH terms
Electronics*
Fullerenes*
Substances
Fullerenes