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A Generalized Model for Curved Nanobeams Incorporating Surface Energy.
Micromachines (Basel). 2023 Mar 16;14(3):663. doi: 10.3390/mi14030663.
Micromachines (Basel). 2023.
PMID: 36985070
Free PMC article.
Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator.
Al-Ghamdi MS, Alneamy AM, Park S, Li B, Khater ME, Abdel-Rahman EM, Heppler GR, Yavuz M.
Al-Ghamdi MS, et al. Among authors: khater me.
Sensors (Basel). 2017 May 13;17(5):1121. doi: 10.3390/s17051121.
Sensors (Basel). 2017.
PMID: 28505097
Free PMC article.
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