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luan zu
(1 results)?
Micromechanical mode-localized electric current sensor.
Microsyst Nanoeng. 2022 Apr 14;8:42. doi: 10.1038/s41378-022-00375-1. eCollection 2022.
Microsyst Nanoeng. 2022.
PMID: 35498340
Free PMC article.
Design of a Capacitive MEMS Accelerometer with Softened Beams.
Wang C, Hao Y, Sun Z, Zu L, Yuan W, Chang H.
Wang C, et al. Among authors: zu l.
Micromachines (Basel). 2022 Mar 17;13(3):459. doi: 10.3390/mi13030459.
Micromachines (Basel). 2022.
PMID: 35334750
Free PMC article.
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