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liu haodong feng
(2 results)?
Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter-Heater Unit.
Micromachines (Basel). 2022 Dec 18;13(12):2252. doi: 10.3390/mi13122252.
Micromachines (Basel). 2022.
PMID: 36557551
Free PMC article.
Process Optimization and Performance Evaluation of TSV Arrays for High Voltage Application.
Feng L, Zeng S, Su Y, Wang L, Xu Y, Guo S, Chen S, Ji Y, Peng X, Wu Z, Wang S.
Feng L, et al.
Micromachines (Basel). 2022 Dec 30;14(1):102. doi: 10.3390/mi14010102.
Micromachines (Basel). 2022.
PMID: 36677165
Free PMC article.
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A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy.
Chen S, Feng L, Guo S, Ji Y, Zeng S, Peng X, Xu Y, Hu T, Wu Z, Wang S.
Chen S, et al. Among authors: feng l.
Sensors (Basel). 2023 Jan 22;23(3):1276. doi: 10.3390/s23031276.
Sensors (Basel). 2023.
PMID: 36772316
Free PMC article.
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Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement.
Guo S, Feng L, Chen S, Ji Y, Peng X, Xu Y, Yin Y, Wang S.
Guo S, et al. Among authors: feng l.
Sensors (Basel). 2022 Nov 29;22(23):9275. doi: 10.3390/s22239275.
Sensors (Basel). 2022.
PMID: 36501977
Free PMC article.
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