Thin Film on CMOS Active Pixel Sensor for Space Applications

Jan Dirk Schulze Spuentrup; Joachim N Burghartz; Heinz-Gerd Graf; Christine Harendt; Franz Hutter; Markus Nicke; Uwe Schmidt; Markus Schubert; Juergen Sterzel

doi:10.3390/s8106340

Thin Film on CMOS Active Pixel Sensor for Space Applications

Sensors (Basel). 2008 Oct 13;8(10):6340-6354. doi: 10.3390/s8106340.

Authors

Jan Dirk Schulze Spuentrup¹, Joachim N Burghartz², Heinz-Gerd Graf³, Christine Harendt⁴, Franz Hutter⁵, Markus Nicke⁶, Uwe Schmidt⁷, Markus Schubert⁸, Juergen Sterzel⁹

Affiliations

¹ Institut fuer Mikroelektronik Stuttgart, Allmandring 30a, 70569 Stuttgart, Germany. spuentrup@ims-chips.de.
² Institut fuer Mikroelektronik Stuttgart, Allmandring 30a, 70569 Stuttgart, Germany. burghartz@ims-chips.de.
³ Institut fuer Mikroelektronik Stuttgart, Allmandring 30a, 70569 Stuttgart, Germany. graf@ims-chips.de.
⁴ Institut fuer Mikroelektronik Stuttgart, Allmandring 30a, 70569 Stuttgart, Germany. harendt@ims-chips.de.
⁵ Institut fuer Mikroelektronik Stuttgart, Allmandring 30a, 70569 Stuttgart, Germany. hutter@ims-chips.de.
⁶ Jena-Optronik GmbH, 07745 Jena, Germany. markus.nicke@gmail.com.
⁷ Jena-Optronik GmbH, 07745 Jena, Germany. uwe.schmidt@jena-optronik.de.
⁸ Institut fuer Physikalische Elektronik Universitaet Stuttgart / 70569 Stuttgart, Germany. markus.schubert@ipe.uni-stuttgart.de.
⁹ Jena-Optronik GmbH, 07745 Jena, Germany. juergen.sterzel@jena-optronik.de.

Abstract

A 664 x 664 element Active Pixel image Sensor (APS) with integrated analog signal processing, full frame synchronous shutter and random access for applications in star sensors is presented and discussed. A thick vertical diode array in Thin Film on CMOS (TFC) technology is explored to achieve radiation hardness and maximum fill factor.

Keywords: APS; global shutter; imager; radiation hardness; star sensor.