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Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant.
Materials (Basel). 2022 Apr 12;15(8):2817. doi: 10.3390/ma15082817.
Materials (Basel). 2022.
PMID: 35454510
Free PMC article.
Optimization of selective laser etching (SLE) for glass micromechanical structure fabrication.
Butkutė A, Baravykas T, Stančikas J, Tičkūnas T, Vargalis R, Paipulas D, Sirutkaitis V, Jonušauskas L.
Butkutė A, et al. Among authors: stancikas j.
Opt Express. 2021 Jul 19;29(15):23487-23499. doi: 10.1364/OE.430623.
Opt Express. 2021.
PMID: 34614613
Free article.
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