Carbon dioxide detection is a relevant issue in many fields, and this work focuses on the use of a BaTiO(3)-CuO sputtered thin film layer in a gas sensor prototype for air quality measurements. For this, a double side sensor was fabricated, with a Pt heater on one side and the sensing layer over the electrodes on the other side. The uniformity of the temperature on the sensing layer was tested and further tests to check its sensing performance were carried out. Humidity influence in the detection was found to be almost negligible within the usual range in air quality measurements and repeatability tests show satisfactory results for air quality control purposes.
Keywords: BaTiO3-CuO; air quality; carbon dioxide; thin film.