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Page 1
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers.
Microsyst Nanoeng. 2022 Nov 30;8:125. doi: 10.1038/s41378-022-00458-z. eCollection 2022.
Microsyst Nanoeng. 2022.
PMID: 36465157
Free PMC article.
Analog Spatial Light Modulators Based on Micromirror Arrays.
Dauderstädt U, Dürr P, Gehner A, Wagner M, Schenk H.
Dauderstädt U, et al. Among authors: schenk h.
Micromachines (Basel). 2021 Apr 23;12(5):483. doi: 10.3390/mi12050483.
Micromachines (Basel). 2021.
PMID: 33922590
Free PMC article.
Item in Clipboard
High-performance coatings for micromechanical mirrors.
Gatto A, Yang M, Kaiser N, Heber J, Schmidt JU, Sandner T, Schenk H, Lakner H.
Gatto A, et al. Among authors: schenk h.
Appl Opt. 2006 Mar 1;45(7):1602-7. doi: 10.1364/ao.45.001602.
Appl Opt. 2006.
PMID: 16539269
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Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers.
Kaiser B, Langa S, Ehrig L, Stolz M, Schenk H, Conrad H, Schenk H, Schimmanz K, Schuffenhauer D.
Kaiser B, et al. Among authors: schenk h.
Microsyst Nanoeng. 2019 Oct 7;5:43. doi: 10.1038/s41378-019-0095-9. eCollection 2019.
Microsyst Nanoeng. 2019.
PMID: 31636932
Free PMC article.
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A small-gap electrostatic micro-actuator for large deflections.
Conrad H, Schenk H, Kaiser B, Langa S, Gaudet M, Schimmanz K, Stolz M, Lenz M.
Conrad H, et al. Among authors: schenk h.
Nat Commun. 2015 Dec 11;6:10078. doi: 10.1038/ncomms10078.
Nat Commun. 2015.
PMID: 26655557
Free PMC article.
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Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration.
Uhlig S, Gaudet M, Langa S, Schimmanz K, Conrad H, Kaiser B, Schenk H.
Uhlig S, et al. Among authors: schenk h.
Micromachines (Basel). 2018 Apr 18;9(4):190. doi: 10.3390/mi9040190.
Micromachines (Basel). 2018.
PMID: 30424123
Free PMC article.
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