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Page 1
Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching.
Micromachines (Basel). 2021 Apr 29;12(5):501. doi: 10.3390/mi12050501.
Micromachines (Basel). 2021.
PMID: 33946701
Free PMC article.
Towards high-throughput large-area metalens fabrication using UV-nanoimprint lithography and Bosch deep reactive ion etching.
Dirdal CA, Jensen GU, Angelskår H, Vaagen Thrane PC, Gjessing J, Ordnung DA.
Dirdal CA, et al. Among authors: jensen gu.
Opt Express. 2020 May 11;28(10):15542-15561. doi: 10.1364/OE.393328.
Opt Express. 2020.
PMID: 32403580
Free article.
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Microfabricated 1-3 composite acoustic matching layers for 15 MHz transducers.
Manh T, Jensen GU, Johansen TF, Hoff L.
Manh T, et al. Among authors: jensen gu.
Ultrasonics. 2013 Aug;53(6):1141-9. doi: 10.1016/j.ultras.2013.02.010. Epub 2013 Mar 5.
Ultrasonics. 2013.
PMID: 23522684
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Modeling of micromachined silicon-polymer 2-2 composite matching layers for 15MHz ultrasound transducers.
Manh T, Jensen GU, Johansen TF, Hoff L.
Manh T, et al. Among authors: jensen gu.
Ultrasonics. 2014 Apr;54(4):1088-96. doi: 10.1016/j.ultras.2014.01.001. Epub 2014 Jan 11.
Ultrasonics. 2014.
PMID: 24495997
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