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High-Figure-of-Merit X-Cut Lithium Niobate MEMS Resonators Operating Around 50 MHz for Large Passive Voltage Amplification in Radio Frequency Applications.
IEEE Trans Ultrason Ferroelectr Freq Control. 2020 Jul;67(7):1392-1402. doi: 10.1109/TUFFC.2020.2972293. Epub 2020 Feb 7.
IEEE Trans Ultrason Ferroelectr Freq Control. 2020.
PMID: 32054573
Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry.
Vidal-Álvarez G, Marigó E, Torres F, Barniol N.
Vidal-Álvarez G, et al.
Micromachines (Basel). 2016 Mar 2;7(3):40. doi: 10.3390/mi7030040.
Micromachines (Basel). 2016.
PMID: 30407413
Free PMC article.
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Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution.
Vidal-Álvarez G, Agustí J, Torres F, Abadal G, Barniol N, Llobet J, Sansa M, Fernández-Regúlez M, Pérez-Murano F, San Paulo Á, Gottlieb O.
Vidal-Álvarez G, et al.
Nanotechnology. 2015 Apr 10;26(14):145502. doi: 10.1088/0957-4484/26/14/145502. Epub 2015 Mar 18.
Nanotechnology. 2015.
PMID: 25786069
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