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rong zhi chen
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Note: automatic mass-flow configuration method for evaluating turbomolecular pump performance.
Rev Sci Instrum. 2012 Jun;83(6):066108. doi: 10.1063/1.4730593.
Rev Sci Instrum. 2012.
PMID: 22755674
Development of a piezoelectric vacuum sensing component for a wide pressure range.
Wang BY, Hsieh FC, Lin CY, Chen SE, Chen FZ, Wu CC.
Wang BY, et al. Among authors: chen fz.
Sensors (Basel). 2014 Nov 21;14(11):22099-112. doi: 10.3390/s141122099.
Sensors (Basel). 2014.
PMID: 25421736
Free PMC article.
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