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2015 | 1 |
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Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging.
Sensors (Basel). 2015 Apr 3;15(4):8020-41. doi: 10.3390/s150408020.
Sensors (Basel). 2015.
PMID: 25855038
Free PMC article.
Review.
Designing piezoelectric films for micro electromechanical systems.
Trolier-McKinstry S, Griggio F, Yaeger C, Jousse P, Zhao D, Bharadwaja SS, Jackson TN, Jesse S, Kalinin SV, Wasa K.
Trolier-McKinstry S, et al. Among authors: griggio f.
IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Sep;58(9):1782-92. doi: 10.1109/TUFFC.2011.2015.
IEEE Trans Ultrason Ferroelectr Freq Control. 2011.
PMID: 21937309
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