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Investigation of Integrated Reactive Multilayer Systems for Bonding in Microsystem Technology.
Micromachines (Basel). 2021 Oct 19;12(10):1272. doi: 10.3390/mi12101272.
Micromachines (Basel). 2021.
PMID: 34683323
Free PMC article.
Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications.
Bourim EM, Kim HY, Chung NK.
Bourim EM, et al.
Micromachines (Basel). 2018 Sep 25;9(10):490. doi: 10.3390/mi9100490.
Micromachines (Basel). 2018.
PMID: 30424423
Free PMC article.
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