Micro-machining

Philos Trans A Math Phys Eng Sci. 2012 Aug 28;370(1973):3973-92. doi: 10.1098/rsta.2011.0056.

Abstract

Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range-a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

Publication types

  • Review

MeSH terms

  • Equipment Design
  • Industry / instrumentation*
  • Industry / methods*
  • Manufactured Materials*
  • Micromanipulation / instrumentation*
  • Micromanipulation / methods*
  • Miniaturization
  • Nanotechnology / instrumentation*
  • Nanotechnology / methods*