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byeongyeon choi
(1 results)?
On the Quenching of Electron Temperature in Inductively Coupled Plasma.
Materials (Basel). 2023 Apr 19;16(8):3219. doi: 10.3390/ma16083219.
Materials (Basel). 2023.
PMID: 37110054
Free PMC article.
Characterization of SiO2 Plasma Etching with Perfluorocarbon (C4F8 and C6F6) and Hydrofluorocarbon (CHF3 and C4H2F6) Precursors for the Greenhouse Gas Emissions Reduction.
Choi M, Lee Y, You Y, Cho C, Jeong W, Seong I, Choi B, Kim S, Seol Y, You S, Yeom GY.
Choi M, et al. Among authors: choi b.
Materials (Basel). 2023 Aug 14;16(16):5624. doi: 10.3390/ma16165624.
Materials (Basel). 2023.
PMID: 37629915
Free PMC article.
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