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Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si.
Micromachines (Basel). 2021 Jul 21;12(8):849. doi: 10.3390/mi12080849.
Micromachines (Basel). 2021.
PMID: 34442471
Free PMC article.
Pseudoepitaxial transrotational structures in 14 nm-thick NiSi layers on [001] silicon.
Alberti A, Bongiorno C, Cafra B, Mannino G, Rimini E, Metzger T, Mocuta C, Kammler T, Feudel T.
Alberti A, et al. Among authors: cafra b.
Acta Crystallogr B. 2005 Oct;61(Pt 5):486-91. doi: 10.1107/S0108768105022585. Epub 2005 Sep 23.
Acta Crystallogr B. 2005.
PMID: 16186648
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