Compact Slot Microring Resonator for Sensitive and Label-Free Optical Sensing

Sensors (Basel). 2022 Aug 27;22(17):6467. doi: 10.3390/s22176467.

Abstract

A novel all-pass slot microring resonator (SMRR), intended for label-free optical biosensing based on silicon-on-insulator platforms, is proposed. The sensor consists of a bent asymmetric directional coupler and an asymmetric-slot microring waveguide. The appropriate slot width of 140 nm is identified by the three-dimensional finite-difference time-domain (3D-FDTD) method for better light-matter interaction in applications. According to numerical calculations, the SMRR sensor with a footprint of 10 µm × 10 µm has a concentration sensitivity of 725.71 pm/% for sodium chloride (NaCl) solutions. The corresponding refractive index sensitivity is 403 nm/RIU (refractive index unit), which is approximately six times greater than that of traditional microring resonator sensors. A low detection limit of 0.129% is also achieved. This SMRR is an excellent candidate for label-free optical biosensors due to its compact structure and excellent sensing capability.

Keywords: biosensors; integrated optics devices; silicon on insulator; slot microring resonator.

MeSH terms

  • Biosensing Techniques* / methods
  • Refractometry*
  • Silicon / chemistry

Substances

  • Silicon

Grants and funding

This research was funded by National Key Research and Development Program (grant number 2021YFB3601404), National Natural Science Foundation of China (NSFC), grant number 61675238, 61975247 and 61775244.