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Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators.
Micromachines (Basel). 2023 Mar 22;14(3):700. doi: 10.3390/mi14030700.
Micromachines (Basel). 2023.
PMID: 36985106
Free PMC article.
Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits.
Rabih AAS, Sharma S, Pita J, Ménard M, Nabki F.
Rabih AAS, et al.
Opt Express. 2023 Sep 11;31(19):30797-30814. doi: 10.1364/OE.500102.
Opt Express. 2023.
PMID: 37710615
Free article.
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