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Development and Research of the Sensitive Element of the MEMS Gyroscope Manufactured Using SOI Technology.
Micromachines (Basel). 2023 Apr 21;14(4):895. doi: 10.3390/mi14040895.
Micromachines (Basel). 2023.
PMID: 37421128
Free PMC article.
Investigation and Research of High-Performance RF MEMS Switches for Use in the 5G RF Front-End Modules.
Tkachenko A, Lysenko I, Kovalev A.
Tkachenko A, et al.
Micromachines (Basel). 2023 Feb 18;14(2):477. doi: 10.3390/mi14020477.
Micromachines (Basel). 2023.
PMID: 36838177
Free PMC article.
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