Near-field Raman imaging using optically trapped dielectric microsphere

Opt Express. 2008 May 26;16(11):7976-84. doi: 10.1364/oe.16.007976.

Abstract

The stumbling block of employing Raman imaging in nanoscience and nanotechnology is the diffraction-limited spatial resolution. Several approaches have been employed to improve the spatial resolution, among which aperture and apertureless near-field Raman techniques are the most frequently used. In this letter, we report a new approach in doing near-field Raman imaging with spatial resolution of about 80 nm, by trapping and scanning a polystyrene microsphere over the sample surface in water. We have used this technique to resolve PMOS transistors with SiGe source drain stressors with poly-Si gates, as well as gold nanopatterns with excellent reproducibility.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Image Enhancement / methods*
  • Microscopy, Confocal / methods*
  • Microspheres
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Spectrum Analysis, Raman / methods*