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An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope.
Microsc Microanal. 2023 Jun 9;29(3):938-952. doi: 10.1093/micmic/ozad051.
Microsc Microanal. 2023.
PMID: 37749697
Accuracy of a reference-free Monte Carlo approach for SEM-EDS thickness assessment of TiN coatings onto diverse substrates.
Cruz JPN, Garzón CM, Noreña JK, Pineda F, Cachaya JS, Recco AAC.
Cruz JPN, et al. Among authors: recco aac.
Micron. 2022 Mar;154:103204. doi: 10.1016/j.micron.2021.103204. Epub 2021 Dec 31.
Micron. 2022.
PMID: 35032724
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