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New Volatile Tantalum Imido Precursors with Carboxamide Ligands.
Hwang JM, Lee SK, Shin S, Jeong JS, Kim HS, Ryu JY, Eom T, Park BK, Kim CG, Chung TM. Hwang JM, et al. Among authors: eom t. ACS Omega. 2021 Sep 16;6(38):24795-24802. doi: 10.1021/acsomega.1c03659. eCollection 2021 Sep 28. ACS Omega. 2021. PMID: 34604661 Free PMC article.
Area-selective atomic layer deposition on 2D monolayer lateral superlattices.
Park J, Kwak SJ, Kang S, Oh S, Shin B, Noh G, Kim TS, Kim C, Park H, Oh SH, Kang W, Hur N, Chai HJ, Kang M, Kwon S, Lee J, Lee Y, Moon E, Shi C, Lou J, Lee WB, Kwak JY, Yang H, Chung TM, Eom T, Suh J, Han Y, Jeong HY, Kim Y, Kang K. Park J, et al. Among authors: eom t. Nat Commun. 2024 Mar 8;15(1):2138. doi: 10.1038/s41467-024-46293-w. Nat Commun. 2024. PMID: 38459015 Free PMC article.
231 results