Thermally assisted nanotransfer printing with sub-20-nm resolution and 8-inch wafer scalability.
Park TW, Byun M, Jung H, Lee GR, Park JH, Jang HI, Lee JW, Kwon SH, Hong S, Lee JH, Jung YS, Kim KH, Park WI.
Park TW, et al. Among authors: lee gr, lee jw, lee jh.
Sci Adv. 2020 Jul 29;6(31):eabb6462. doi: 10.1126/sciadv.abb6462. eCollection 2020 Jul.
Sci Adv. 2020.
PMID: 32832691
Free PMC article.