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Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis.
Materials (Basel). 2023 Apr 11;16(8):3015. doi: 10.3390/ma16083015.
Materials (Basel). 2023.
PMID: 37109853
Free PMC article.
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